H2 and He impurities in Neon


The atmosphere contains only very small quantities of noble gases such as xenon (Xe), krypton (Kr) and neon (Ne). The recovery of these noble gases by fractional distillation of liquefied air is therefore only worthwhile in very large air separation units (ASU). The proportion of neon in the air is only 0.00161 vol%.

Neon is needed in both the lighting industry as well as in the semiconductor industry. For the latter application, high-purity neon is needed as a buffer gas for lasers in semiconductor lithography with a resolution of 7 nm.


With the HSense, existing hydrogen and helium impurities in a neon pressurized gas container (bottle or storage tank) can be determined on-line.

Thanks to the low detection limits (<1ppm H2 and <4 ppm He), neon with a purity of ≧ 99.999 vol% can be tested.

Photo Industry Solution V&F Industrial Gases Impurities Neon


On the one hand, impurities in neon can be measured quickly with a HSense H2 and He, and on the other, detection is very reliable due to the sector field mass spectrometer used. Traces of hydrogen below 1 ppm and helium below 4 ppm can be detected. The measurement result is available within a few minutes.

Calibration and measurement are fully automatic, if desired. Certificates of Analysis (CoAs) based on self-definable templates can be easily generated.


  • Sensitive detection of impurity traces of H2 and He
  • Fast & reliable measurement technique
  • Time-saving & cost-effective

Reference clients (excerpt)

Reference Tokyo Gas

Suitable devices